Kukushkin, S. A., & Osipov, A. V. (2022). Thermodynamics, kinetics, and technology of synthesis of epitaxial layers of silicon carbide on silicon by coordinated substitution of atoms, and its unique properties. A review. Condensed Matter and Interphases, 24(4), 407-458. https://doi.org/10.17308/kcmf.2022.24/10549