Gulyaev, V. V., Dikerev, J. I., RubinsteinV. М., TsvetkovS. М., & Bormontov, E. N. (2010). HIGH-RATE PLASMA-CHEMICAL ETCHING OF LITHIUM NIOBATE. Condensed Matter and Interphases, 12(4), 360-368. Retrieved from https://journals.vsu.ru/kcmf/article/view/1134