Turishchev, S. Y., Koyuda, D. A., Ershov, A. V., Vainer, U. A., Kulikova, T. V., Agapov, B. L., Zinchenko, E. N., Grechkina, M. V., Usoltseva, D. S., & Terekhov, V. A. (2018). STRUCTURE AND COMPOSITION EVOLUTION a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES UNDER HIGH TEMPERATURE ANNEAL. Condensed Matter and Interphases, 20(3), 477-485. https://doi.org/10.17308/kcmf.2018.20/586