Afonin, N. N., Darinskii, B. M., Logachova, V. A., & Khoviv, A. M. (2012). ANALYSIS REDISTRIBUTION OF CONCENTRATION COMPONENTS DURING MAGNETRON SPUTTERING NIOBIUM ON SILICON SINGLE CRYSTALS. Condensed Matter and Interphases, 14(1), 9-14. Retrieved from https://journals.vsu.ru/kcmf/article/view/940