Technology for obtaining high-quality optical surfaces of elements based on high-purity zinc chalcogenides: a short review

Oleg V. Timofeev; Evgeny O. Timofeev

doi:10.17308/kcmf.2026.28/13803

Authors

Oleg V. Timofeev G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences, 49, Tropinin st., Nizhny Novgorod, 603951, Russian Federation
Evgeny O. Timofeev G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences, 49, Tropinin st., Nizhny Novgorod, 603951, Russian Federation

DOI:

https://doi.org/10.17308/kcmf.2026.28/13803

Keywords:

Zinc chalcogenides, Zinc selenide, Zinc sulfide, Chemical etching, Mechanical polishing (MP), Chemical-mechanical polishing (CMP), Magnetorheological polishing (MRP), Surface quality, Roughness, Removal rate, Surface geometry, Chemically active component (CAC)

Abstract

Objectives: the study of the mechanisms of chemical and physical processes occurring on the surface of polycrystalline selenide and zinc sulfide during etching, mechanical, chemical-mechanical, and magnetorheological polishing processes, and, as a result, the development of a technology for obtaining high-quality optical surfaces based on research.

Experimental: three processing methods were compared: mechanical, chemical-mechanical, and magnetorheological polishing. Consistent application of these approaches, including pre-deep grinding-polishing to eliminate the disturbed layer, significantly improves the cleanliness and accuracy of the treated surface. The final magnetorheological polishing ensures the achievement of arithmetic mean roughness (Ra) 0.6–0.8 nm, standard deviation (RMS) 0.8–1 nm, surface quality of classes 2–3 according to GOST 11141–84, and accuracy of the shape of optical elements up to λ/4.

Conclusions: based on the obtained results, technologies for mechanical and chemical-mechanical polishing of polycrystalline zinc chalcogenides have been developed, and experimental optical elements are made that meet modern requirements for a wide range of optical applications. These technologies were introduced into optical production in 2008–2018 by R’AIN Group (NN Optics LLC, NN Intelligent Systems LLC) and are currently used in the manufacture of high-quality flat and spherical optics

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Author Biographies

Oleg V. Timofeev, G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences, 49, Tropinin st., Nizhny Novgorod, 603951, Russian Federation

Cand. Sci. (Chem.), Associate Professor in Inorganic Chemistry, Research Fellow at the Laboratory of High-Purity Optical Materials, G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences (Nizhny Novgorod, Russian Federation)
Evgeny O. Timofeev, G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences, 49, Tropinin st., Nizhny Novgorod, 603951, Russian Federation

postgraduate student at the G. G. Devyatykh Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences; laboratory assistant at the Laboratory of High-Purity Optical Materials at the Lobachevsky State University of Nizhny Novgorod (Nizhny Novgorod, Russian Federation)

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