Microfluidic systems in gas analysis (review)
DOI:
https://doi.org/10.17308/sorpchrom.2015.15/329Keywords:
microfluidic systems, gas analysis, gas chromatography, capillary columns, micro elecro mechanical systems, Lab-on-a-Chip.Abstract
The article presents the basics of the microfluidic technology for gas chromatographic analysis. The
review includes domestic and foreign publications from 1979 to 2015. The main materials for the
manufacture of the microfluidic sistems are silicon, glass and polymer plates. For the manufacture of
microfluidic systems it is advisable to use of planar and three-dimensional microtechnology, allowing to
form two-dimensional and three-dimensional structures on the substrate. The general scheme of the creation
of microfluidic systems includes the preparation of the substrate (silicon, quartz, glass, plastic, etc.), creation
of a template for the selected topology microfluidic system, the formation of micro-relief and sealing
channels. The advantages of microfluidic devices for gas analytical equipment (dispensers, concentrators,
columns, detectors) are presented. The use of microfluidic systems in gas analysis technique allows you to
create not only a compact portable devices, but also can reduce the analysis time in thirty or more times
compared with stationary devices.
