АНАЛИЗ МОРФОЛОГИИ И СОСТАВА ПОКРЫТИЙ НА ОСНОВЕ НИТРИДА ТИТАНА, СФОРМИРОВАННЫХ МЕТОДОМ КОНДЕНСАЦИИ С ИОННОЙ БОМБАРДИРОВКОЙ

Pavel V. Orlov; Dmitry N. Korotaev; Sergey N. Nesov; Petr M. Korusenko; Sergey N. Povoroznyuk

doi:10.17308/kcmf.2018.20/638

Authors

Pavel V. Orlov Cand. Sci. (Tech.), Lead Researcher of Siberian State Automobile and Highway University (SibADI), Omsk, Russia; tel.: +7 (3812) 650145, e-mail: orlov-pv@mail.ru
Dmitry N. Korotaev Dr. Sci. (Tech.), Associate Professor, Professor of Siberian State Automobile and Highway University (SibADI), Omsk, Russia; tel.: +7 (3812) 729979, korotaevd99@mail.ru
Sergey N. Nesov Cand. Sci. (Phys.-Math.), Junior Researcher, Laboratory of Physics of Nanomaterials and Heterostructures, Omsk Scientific Center SB RAS, Omsk, Russia; tel.: +7 (913) 6639018, e-mail: nesov55@mail.ru
Petr M. Korusenko Cand. Sci. (Phys.-Math.), Junior Researcher of the Laboratory of Physics of Nanomaterials and Heterostructures, Omsk Scientiﬁc Center SB RAS; Associate Professor of the Department of “Mechanical Engineering and Materials Science” of the Omsk State Technical University, Omsk, Russia; tel.: +7 (983) 6214220, e-mail: korusenko@obisp.oscsbras.ru
Sergey N. Povoroznyuk Cand. Sci. (Tech.), Associate Professor, Senior Researcher of the Laboratory of Physics of Nanomaterials and Heterostructures, Omsk Scientific Center SB RAS; Associate Professor of the Department of "Mechanical Engineering and Materials Science" of the Omsk State Technical University, Omsk, Russia; tel.: +7 (913) 1422386, e-mail: povorozn@obisp.oscsbras.ru

DOI:

https://doi.org/10.17308/kcmf.2018.20/638

Keywords:

titanium nitride, coating, condensation with ion bombardment, CIB, X-ray photoelectron spectroscopy, ion sputtering.

Abstract

The main objective of this paper was to study the morphology, composition and chemical state of coatings based on titanium nitride obtained using the condensation method with ion bombardment. Scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS) were used to analyse the structure and composition of the coatings produced at different formation times.

It was determined that coatings formed at different times still have a sufficiently close chemical composition and contain titanium nitride (TiN), titanium oxynitride (TiN_xO_1-x), titanium oxide (TiO_x) and titanium carbide (TiC). The paper demonstrates that the increase in the formation time of coatings leads to a decrease in the proportion of carbon in the amorphous state and an increase in the fraction of carbon which is a part of titanium carbides. In the composition of coatings formed in 15 and 50 minutes, the fraction of carbon chemically bonded to titanium differs by a factor of two.

The XPS analysis with the Ar⁺ ion sputtering showed that the coatings have an uneven distribution of elements in depth. It is demonstrated that with the increase in etching time, a significant decrease in the total carbon concentration in the coating is observed. At the same time, the proportion of carbon chemically bonded to titanium increases. It was also found that the TiN decreases, while the amount of TiN_xO_1-xand TiO_x increases. Basing on the data obtained, we propose descriptions for the dynamics of diffusion of carbon and oxygen and the formation of carbides, oxynitrides, and titanium oxides during the formation of coatings.

acknowledgment

The authors are grateful to Ivlev K. E. for conducting the SEM study of the samples using the SEM method, as well as to the management of the Omsk Scientific Center SB RAS for providing the equipment for studying the samples using the SEM and EDX methods.

The work was financially supported by the Ministry of Education and Science of the Russian Federation as part of a state task, project No. 11.11760.2018 / 11.12.