Phase transformations during the annealing of Ga2O3 films

Authors

DOI:

https://doi.org/10.17308/kcmf.2023.25/11479

Keywords:

Reconstructive phase transitions, Gallium oxide, Polymorphs, X-ray diffraction, Spectroscopic ellipsometry, Raman spectrum

Abstract

       A growth technique has been developed to obtain the three main crystalline phases of Ga2O3, namely: a-phases, e-phases, and b-phases using hybrid vapour phase epitaxy (HVPE). The substrate temperatures and precursor fluxes were determined at which only the a-phase, only the e-phase, or only the b-phase were deposited. It was found that the annealing of the metastable a- and e-phases led to completely different results. The e-phase quickly transforms into the stable b-phase as a result of annealing, while the a-phase, upon annealing, transforms into an intermediate amorphous phase, after which it peels off and is destroyed. The obtained result is explained by the fact that the reconstructive phase transition from the a-phase into the b-phase is accompanied by too large an increase in density (~10%), leading to enormous elastic stresses
and, consequently, an increase in the height of the phase transition barrier

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Author Biographies

  • Andrei V. Osipov, Institute for Problems in Mechanical Engineering of the Russian Academy of Science, 61 Boljshoy prospekt V.O., St. Petersburg 199178, Russian Federation

    Dr. Sci. (Phys.–Math.), Head of
    the Laboratory of Structural and Phase Transformations
    of the Institute for Problems of Mechanical Engineering
    of the Russian Academy of Sciences (St. Petersburg,
    Russian Federation)

  • Shukrillo Sh. Sharofidinov, Ioffe Institute, 26 Polytechnicheskaya st., St. Petersburg 194021, Russian Federation

    Cand. Sci. (Phys.–Math.),
    Senior Researcher of the Laboratory of Semiconductor
    Devices Physics, Ioffe Institute of the Russian Academy
    of Sciences (St. Petersburg, Russian Federation)

  • Arina V. Kremleva, ITMO University, 49 Kronverksky pr., bldg. A, St. Petersburg 197101, Russian Federation

    Cand. Sci. (Phys.–Math.),
    Associate Professor, National Research University
    ITMO (St. Petersburg, Russian Federation)

  • Andrey M. Smirnov, ITMO University, 49 Kronverksky pr., bldg. A, St. Petersburg 197101, Russian Federation

    Cand. Sci. (Phys.–Math.),
    Associate Professor, National Research University,
    ITMO (Saint-Petersburg, Russian Federation)

  • Elena V. Osipova, Institute for Problems in Mechanical Engineering of the Russian Academy of Science, 61 Boljshoy prospekt V.O., St. Petersburg 199178, Russian Federation

    Cand. Sci. (Phys.–Math.), Senior
    Researcher of the Laboratory of Wave Process
    Modeling, Institute for Problems of Mechanical
    Engineering of the Russian Academy of Sciences (St.
    Petersburg, Russian Federation)

  • Andrei V. Kandakov, Institute for Problems in Mechanical Engineering of the Russian Academy of Science, 61 Boljshoy prospekt V.O., St. Petersburg 199178, Russian Federation

    Research Associate, Laboratory
    of Structural and Phase Transformations, Institute for
    Problems of Mechanical Engineering, Russian
    Academy of Sciences (St. Petersburg, Russian
    Federation)

  • Sergey A. Kukushkin, Institute for Problems in Mechanical Engineering of the Russian Academy of Science, 61 Boljshoy prospekt V.O., St. Petersburg 199178, Russian Federation

    Dr. Sci. (Phys.–Math.),
    Professor, Chief Researcher, Head of the Laboratory of
    Structural and Phase Transformations in Condensed
    Media, Institute for Problems in Mechanical
    Engineering of the Russian Academy of Sciences (St.
    Petersburg, Russian Federation)

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Published

2023-10-12

Issue

Vol. 25 No. 4 (2023)

Section

Original articles

How to Cite

Phase transformations during the annealing of Ga2O3 films. (2023). Kondensirovannye Sredy I Mezhfaznye Granitsy = Condensed Matter and Interphases, 25(4), 557-563. https://doi.org/10.17308/kcmf.2023.25/11479

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