Ozone detection by means of semiconductor gas sensors based on palladium (II) oxide

  • Stanislav V. Ryabtsev Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-7635-8162
  • Dina A. A. Ghareeb Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Alexander A. Sinelnikov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Sergey Yu. Turishchev Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0003-3320-1979
  • Lyudmila A. Obvintseva Russian State University named after A. N. Kosygin, 1 Malaya Kaluzhskaya str., Moscow 119071, Russian Federation
  • Aleksey V. Shaposhnik Voronezh State Agricultural University, 1 Michurina ul., Voronezh 394087, Russian Federation https://orcid.org/0000-0002-1214-2730
Keywords: palladium oxide, Ultrathin films, Electron microscopy, Reflection high-energy electron diffraction, Phase composition, Electrical noise, Gas sensitivity properties, Ozone

Abstract

Thin film semiconductor sensors based on palladium oxide were produced to analyse the concentration of ozone in the air. The palladium oxide films were obtained by means of thermal oxidation of ~ 20-30 nm metal in air at various temperatures. The oxide films were studied using electron microscopy and reflection high-energy electron diffraction. The optical, electrophysical, and gas sensitivity properties of the films were investigated. The study determined the optimal oxidation annealing temperature that ensures the uniform composition of the films and absence of electrical noise affecting the gas detection process. The article explains that electrical noise in ultrathin films is caused by their fragmentation during oxidation annealing. The study demonstrated the high sensitivity of the obtained films to oxide.

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Author Biographies

Stanislav V. Ryabtsev, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Physics and
Mathematics, Senior Researcher, Department of Solid
State Physics and Nanostructures, Voronezh State
University, Voronezh, Russian Federation; e-mail:
ryabtsev@phys.vsu.ru

Dina A. A. Ghareeb, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

postgraduate student,
Department of Solid State Physics and Nanostructures,
Voronezh State University; Voronezh, Russian
Federation

Alexander A. Sinelnikov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD in Physics and
Mathematics, Head of the Department of Materials
Science and Nanotechnology, Voronezh State
University, Voronezh, Russian Federation; е-mail:
rnileme@mail.ru

Sergey Yu. Turishchev, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Physics and
Mathematics, Associate Professor, Department of Solid
State Physics and Nanostructures, Voronezh State
University, Voronezh, Russian Federation; e-mail:
tsu@phys.vsu.ru

Lyudmila A. Obvintseva, Russian State University named after A. N. Kosygin, 1 Malaya Kaluzhskaya str., Moscow 119071, Russian Federation

PhD in Physics and
Mathematics, Russian State University named after
A. N. Kosygin, Moscow, Russian Federation; e-mail:
obvint@yandex.ru.

Aleksey V. Shaposhnik, Voronezh State Agricultural University, 1 Michurina ul., Voronezh 394087, Russian Federation

DSc in Chemical Sciences,
Professor, Head of the Department of Chemistry,
Voronezh State Agrarian University named after
Emperor Peter the Great, Voronezh, Russian Federation;
e-mail: ash@agrochem.vsau.ru

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Published
2021-03-16
How to Cite
Ryabtsev, S. V., Ghareeb, D. A. A., Sinelnikov, A. A., Turishchev, S. Y., Obvintseva, L. A., & Shaposhnik, A. V. (2021). Ozone detection by means of semiconductor gas sensors based on palladium (II) oxide. Condensed Matter and Interphases, 23(1), 56–61. https://doi.org/10.17308/kcmf.2021.23/3303
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