Creation of thin films on the surface of InP with a controlled gas-sensitive signal under the influence of PbO + Y2O3 compositions

  • Victor F. Kostryukov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-5753-5653
  • Dar’ya S. Balasheva Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Anna S. Parshina Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
Keywords: Semiconductors, Indium phosphide, Thin films, Gas sensitivity, Thermal oxidation

Abstract

Thin-film objects with a reproducible temperature dependence of the resistance, thermally stable, and easy to obtain can be used as the sensitive elements in semiconductor gas sensors. The aim of this study was to create thin films on the InP surface under the influence of an oxide chemostimulator + inert component (PbO + Y2O3, respectively) compositions and to determine their gas-sensitive properties and their dependence on the formula of the composition.
Thin films were synthesised on the InP surface by the method of chemically stimulated thermal oxidation under the influence of various PbO + Y2O3 compositions. The thickness of the formed films, their elemental and chemical composition were determined (by laser ellipsometry, X-ray phase analysis, and infra-red spectroscopy). A number of experiments were carried out to establish the gas-sensitive properties of the obtained films with respect to ammonia with concentrations of 120, 100, and 80 ppm.
By chemically stimulated thermal oxidation, we obtained thin films with semiconductor properties on the InP surface. It was determined that the samples had n-type conductivity. A gas-sensitive response was detected in the presence of ammonia in the atmosphere. The ability to create thin films with a predetermined value of sensory response was demonstrated 

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Author Biographies

Victor F. Kostryukov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Chemistry, Associate
Professor, Associate Professor at the Department of
Materials Science and the Industry of Nanosystems,
Voronezh State University, Voronezh, Russian
Federation; e-mail: vc@chem.vsu.ru

Dar’ya S. Balasheva, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

student at the Department of
Materials Science and the Industry of Nanosystems,
Voronezh State University, Voronezh, Russian
Federation; e-mail: balasheva.98@mail.ru

Anna S. Parshina, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

master’s degree student,
Department of Materials Science and the Industry of
Nanosystems, Voronezh State University, Voronezh,
Russian Federation; e-mail: anyuta_parshina@mail.ru

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Published
2021-08-17
How to Cite
Kostryukov, V. F., Balasheva, D. S., & Parshina, A. S. (2021). Creation of thin films on the surface of InP with a controlled gas-sensitive signal under the influence of PbO + Y2O3 compositions. Kondensirovannye Sredy I Mezhfaznye Granitsy = Condensed Matter and Interphases, 23(3), 406-412. https://doi.org/10.17308/kcmf.2021.23/3532
Section
Original articles