THERMAL OXIDATION AS A METHOD OF FORMATION OF NANOSCALE FUNCTIONAL FILMS ON AIIIBV SEMICONDUCTORS: INFLUENCE OF DEPOSITED METAL LAYERS
Keywords:
indium phosphide, gallium arsenide, thermooxidation, chemostimulator, nanoscale range fi lms.
Abstract
Considered the problems that do not allow to fully realize the enormous potential of application of indium phosphide and gallium arsenide in solid-state electronics.The classical and modern results of the thermal oxidation of AIIIBV semiconductors with consideration of process stimulation by photon processing, magnetic pulses, etc. are analyzed and generalized. Particular attention is paid to the fundamental approach to solving the problem of the formation of nanoscale functional films on AIIIBV, consisting in the use of reasonably selected chemical stimulators introduced into the system in various ways with the aim of changing the mechanism of the thermal oxidation process of semiconductors to chemical stimulated. This ensures the occurrence of new interface reactions with kinetically conjugated and heterogeneously catalytic stages, which in a single process allows: 1) to block the negative communication channel between the reactions of componentwise oxidation under thermal oxidation of pure AIIIBV; 2) acceleration of the films formation in comparison with the process of pure AIIIBVoxidation, including branching through the products of the chemical stimulator conversion; 3) lowering the operating parameters of the process (temperature, time) and preventing degradation of the films; 4) purposeful changes in the composition and properties of the nanoscale films with the achievement of target characteristics.
Deposited on the GaAs and InP surface nanoscale layers of d-metals (Ni, Co, and V) have a purposeful multifunctional effect on the composition and properties of the formed films, changing the mechanism of the thermal oxidation of semiconductors from mechanism of pure AIIIBV oxidation to transit or catalytic. Effective kinetic and chemical blocking of the negative communication channel between the stages of pure InP and GaAs oxidationby used of a chemical stimulator prevents the diffusion of unoxidized indium into films (0.3-0.5 % In versus 17 % native oxide, LE, XRD, IRS, USXRES data), segregation arsenic at the inner interface (the content of As in the form of As2O3, As2O5, [AsO4]3- increases 2-5 times XRD, IRS, and USXRES data) and provides the formation of nanoscale films with semiconductor and dielectric characteristics (electrical strength up to 7 ´ 106 V/cm).
ACKNOWLEDGMENTS
The results of the experiment were obtained using the equipment of the Center for Collective Use of Scientific Equipment of Voronezh State University.
Gratitude to Cand. Sci. (Phys.-Math.), Associate Professor Lukin A. N. for research using the IRS method.
The reported study was supported by a grant from the Russian Foundation for Basic Research (project No. 18-03-00354 а.).
Downloads
Download data is not yet available.
References
1. Punkkinen M. P. J., Laukkanen P., Lang J., Kuzmin M., Tuominen M., Tuominen V., Dahl J., Pessa M., Guina M., Kokko K., Sadowski J., Johansson B., Vayrynen I. J., Vitos L. Physical Review B, 2011, no. 83, рp. 195329-1-195329-6. DOI: 10.1103/PhysRevB.83.195329
2. Sluchinskaja I. A. Osnovy materialovedenija i tehnologii poluprovodnikov [Fundamentals of Materials Science and Semiconductor Technology]. Moscow, Mir Publ., 2002, 376 p. (in Russ.)
3. Pasynkov V. V., Sorokin V. S. Materialy jelektronnoj tehniki [Materials of Electronic Engineering]. SPb, Lan' Publ., 2001, 368 p. (in Russ.)
4. Knunjanc I. L. Himicheskaja jenciklopedija: v 5 t. [Chemical Encyclopedia: 5 p.]. Moscow, Sov. jencikl. Publ., 1990, pt. 2, 671 p. (in Russ.)
5. Aseeva A. L. Nanotehnologii v poluprovodnikovoj jelektronike [Nanotechnology in Semiconductor Electronics]. Novosibirsk, SO RAN Publ., 2004, 368 p. (in Russ.)
6. Ismailov I., Sodikov M., Sharipov S. Izvestija Akademii nauk respubliki Tadzhikistan otdelenie fiziko-matematicheskih, himicheskih, geologicheskih i tehnicheskih nauk [Izvestiya of the Academy of Sciences of the Republic of Tajikistan Department of Physical, Mathematical, Chemical, Geological and Technical Sciences], 2012, no. 1 (146), р. 53. (in Russ.)
7. Bolkhovityanov Ju. B., Pchelyakov O. P. Physics-Uspekhi, 2008, vol. 178, no. 5, pp. 459-480. DOI: 10.3367/UFNr.0178.200805b.0459
8. Sychikova Ja. A. Nanorazmernye struktury na poverhnosti fosfida indija [Nanosize Structures on the Surface of Indium Phosphide]. LAP Lambert Academic Publishing, 2014, 127 p. (in Russ.)
9. Engström O. The MOS System. Cambridge University Press, 2014, 216 p.
10. Aderstedt E., Medugorac I., Lundgren P. Sol. St. Electron, 2002, vol. 46 (4). pp. 497-500. DOI: 10.1016/S0038-1101(01)00298-2
11. Oktyabrsky S. Fundamentals of III-V Semiconductor MOSFETs. Springer Science LCC, 2013, 447 p.
12. Chistohin I. B., Zhuravlev K. S. Uspehi prikladnoj fiziki [Advances in Applied Physics], 2015, vol. 3, no. 1, pp. 85-94. (in Russ.)
13. Sheng S. Li Semiconductor Physical Electronics. New York, 2006, 708 p.
14. Arbiol J., Xiong Q. Semiconductor Nanowires: Materials, Synthesis, Characterization and Applications. Elsevier Ltd, 2015, 554 p.
15. Bachhofer H., Reisinger H., Bertagnolli E., von Philipsborn H. J. Appl. Phys., 2011, no. 89 (5), pp. 2791-2800. DOI: 10.1063/1.1343892
16. Ahmad S. R., Cartwright M. Laser Ignition of Energetic Materials. John Wiley & Sons Ltd, 2015, 425 p. DOI: 10.1002/9781118683521
17. Ünlü H., Horing N. J. M., Dabowski J. Low-Dimensional and Nanostructured Materials and Devices. Springer Science LCC, 2015, 674 p. DOI: 10.1007/978-3-319-25340-4
18. Alferov Zh. I. Russian Chemical Reviews, 2013, vol. 82, no. 7, pp. 587-596. DOI: 10.1070/RC2013v082n07ABEH004403
19. Zhukov A. E., Kovsh A. R., Nikitina E. V., Ustinov V. M., Alferov Zh. I. Semiconductors, 2007, vol. 41, no. 5, pp. 625-630. DOI: 10.1134/S1063782607050223
20. Berman L. S., Gabaraeva A. D., Kamanin A. V., Karimov I., Kljachkin L. E., Sharonova L. V., Shmidt N. M. Pis'ma v zhurnal tehnicheskoj fiziki [Letters to the Journal of Technical Physics], 1996, vol. 22, no. 2, pp. 65-69. (in Russ.)
21. Pulver D., Wilmsen C. W. J. Vac. Sci. Technol. B, 2001, vol. 19, pp. 207-214. DOI: 10.1116/1.1342008
22. Beljakova E. D., Gabaraeva A. D., Goreljonok A. T., Karzhavin R.V., Mikushkin V.M., Sysoev S. E., Shmidt N. M. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1992, no. 7, pp. 88-93. (in Russ.)
23. Wilmsen C. W. Thin Solid Films, 1976, vol. 39, no 1-2-3, pp. 105-117. DOI: 10.1016/0040-6090(76)90628-3
24. Wilmsen C. W., Ku R.W., Ceib K. M. Journal of Vacuum Science and Technology, 1979, vol. 16, no. 5, pp. 1434-1438.
25. Mittova I. Ya. Vestnik VGU. Serija: Himija, biologija [Bulletin of the VSU. Series: Chemistry, Biology], 2000, no. 2, pp. 5-12. (in Russ.)
26. Lacuesta T. D. The InP Surface and its Native Oxide. Perth: Murdoch University, 1991, 210 p.
27. Wager J. F., Wilmsen C. W. Journal of Applied Physics, 1980, vol. 51, no. 1, pp. 812-814. DOI: 10.1063/1.327302
28. Spicer W. E., Weber E. R., Liliental-Weber Z., Lindau I. Journal of Vacuum Science and Technology B, 1988, vol. 6, no. 4, pp. 1245-1251. DOI: 10.1116/1.584244
29. Warren A. C., Woodall J. M., Kirchner P. D., Yin X., Pollak F., Melloch M. R., Otsuka N., Mahalingam K. Physical Review B, 1992, vol. 46, pp. 4617-4620. DOI: 10.1103/PhysRevB.46.4617
30. Spicer W. E., Skeath P., Lindau I., Chye P. Physical Review Letters, 1980, vol. 44, pp. 420-423. DOI: 10.1103/PhysRevLett.44.420
31. Allwood D. A., Carline R. T., Mason N. J., Pickering C., Tanner B. K., Walker P. J. Thin Solid Films, 2000, vol. 364, pp. 33-39. DOI: 10.1016/S0040-6090(99)00959-1
32. Guillén-Cervantes A., Rivera-Alvarez Z., Lopez-Lopez M., Lopez-Luna E., Hernandez-Calderon I. Thin Solid Films, 2000, vol. 373, pp. 159-163. DOI: 10.1016/S0040-6090(00)01126-3
33. Pakes A., Skeldon P., Thompson G. E., Hussey R. J., Moisa S., Sproule G. I., Landheer D., Graham M. J. Surface and Interface Analysis, 2002, vol. 34, pp. 481-484. DOI: 10.1002/sia.1343
34. Torhov N. A. Semiconductors, 2003, vol. 37, no. 10, pp. 1205-1213. DOI: 10.1134/1.1619513.
35. Tomashpolskii Y. Y., Sadovskaya N. V, Grigor'eva G. A. The Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2013, no. 9, pp. 95. DOI: 10.7868/S0207352813090175
36. Emel'janov A. V., Portnov S. M. The Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 1995, no. 9, pp. 65-70.
37. Habibulin I. M. Diss. cand. chem. nauk. Stavropol, 1999, 110 p.
38. Isakov D. S., Korobov P. P., Habibullin I. M., Valjuhov D. P. Vestnik Severo-Kavkazskogo federal'nogo universiteta [Bulletin of the North-Caucasian Federal University], 2010, no. 2, pp. 40-45. (in Russ.)
39. Schmuki P., Hussey, R. J., Sproule, G. I., Tao Y., Wasilewski Z. R., McCaffrey J. P., Graham M. J. Corrosion Science, 1999, vol. 41, pp. 1467-1474. DOI: 10.1016/S0010-938X(98)00172-3
40. Nikolaev Ju. A., Rud' V. Ju., Rud' Ju. V., Terukov E. I. Pis'ma v zhurnal tehnicheskoj fiziki [Technical Physics Letters], 2007, vol. 33, no. 4, pp. 331-315. DOI: 10.1134/S1063785007040128
41. Levin M. N., Semenova G. V., Tatarintsev A. V., Shumskaya O. N. Pis'ma v zhurnal tehnicheskoj fiziki [Technical Physics Letters], 2005, vol. 31, no. 9, pp. 762-764. DOI: https://doi.org/10.1134/1.2061739
42. Semenova G. V., Shumskaya O. N., Tatarintzev A. V., Dolgopolova E. A., Dronov M. A., Levin M. N. Condensed Matter and Interphase, 2005, vol. 7, no. 2, pp. 150-153. Available at: http://www.kcmf.vsu.ru/resources/t_07_2_2005_007.pdf (in Russ.)
43. Mittova I. Ya., Pshestanchik V. R. Doklady Akademii Nauk SSSR, 1991, vol. 318, no. 1, pp. 139-143.
44. Benmoussa M., Ibnouelghazi E., Bennouna A., Ameziane E. L. Thin Solid Films, 1995, vol. 265, no. 1-2, pp. 22-28. DOI: 10.1016/0040-6090(95)06617-9
45. Oreshkin V. V., Sedoj V. S., Chemezova L. I. Prikladnaya Fizika [Applied Physics], 2001, no. 3, pp. 94-102. (in Russ.)
46. Vinichenko D. A., Zlomanov V. P., Vasil'ev V. A., Seregin D. S., Berezina O. Y. Inorganic Materials, 2011, vol. 47, no. 3, pp. 330-335. DOI: 10.1134/S0020168511030216
47. Mittova I. Ya., Tomina E. V., Borzakova G. V. Neorganicheskie Materialy [Inorganic Materials], 1991, vol. 27, no. 12, pp. 2480-2483. (in Russ.)
48. Mittova I. Ya., Tomina E. V., Makeeva N. N. Zhurnal neorganicheskoj himii [Russian Journal of Inorganic Chemistry], 1991, vol. 36, no. 12, pp. 3072-3076. (in Russ.)
49. Mittova I. Ya., Tomina E. V., Gubova L. V., Makeeva N. N. Neorganicheskie Materialy [Inorganic Materials], 1992, vol. 28, no. 7, pp. 1360-1364. (in Russ.)
50. Mittova I. Ya., Tomina E. V., Golovenko N. A., Agapov B. L. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 5, pp. 603-606. (in Russ.)
51. Mittova I. Ya., Tomina E. V., Agapov B. L., Maksimova O. V., Borzakova G. V. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 6, pp. 774-777. (in Russ.)
52. Mittova I. Ya., Tomina E. V., Borzakova G. V., Litvinenko E. V. Neorganicheskie Materialy [Inorganic Materials], 1994, vol. 30, no. 5, pp. 612-615. (in Russ.)
53. Mittova I. Ya. Tomina E. V., Soshnikov 3. V., Kashkarov V. L. Neorganicheskie Materialy [Inorganic Materials], 1996, vol. 30, no. 7, pp. 1218-1221. (in Russ.)
54. Mittova I. Ya., Pshestanchik V. R., Tomina E. V., Antipko S. L. Russian Journal of Inorganic Chemistry, 1999, vol. 44, no. 1, pp. 15-19.
55. Mittova I. Ya., Lavrushina S. S., Afonchikova A. V. Russian Journal of Inorganic Chemistry, 2004, vol. 49, no. 8, pp. 1138–1142.
56. Mittova I. Ya., Lavrushina S. S., Kashkarov V. M., Lebedeva E. V., Popelo A. V. Russian Journal of Inorganic Chemistry, 2006, vol. 51, no. 8, pp. 1163–1166. DOI: 10.1134/S0036023606080031
57. Mittova I. Ya., Puhova V. V., Klementeva I. F., Semenov V. N., Kashkarov V.M. Neorganicheskie Materialy [Inorganic Materials], 1988, vol. 24, no. 9, pp. 1431–1434. (in Russ.)
58. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Kashkarov V. M., Shhukarev A. V., Soshnikova M. A. Neorganicheskie Materialy [Inorganic Materials], 1996, vol. 32, no. 9, pp. 917-919.
59. Mittova I. Ya., Soshnikov I. M., Terehov V. A. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 5, pp. 598-601. (in. Russ.)
60. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Shhukarev A. V. Neorganicheskie Materialy [Inorganic Materials], 1997, vol. 33, no. 6, pp. 543-545.
61. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Semenov V. N. Neorganicheskie Materialy [Inorganic Materials], 2000, vol. 36, no. 10, pp. 975-978.
62. Mittova I. Ya., Pshestanchik V. R. Russian Chemical Reviews, 1991, vol. 60, no. 9, pp. 1898-1919. DOI: 10.1070/RC1991v060n09ABEH001122
63. Mittova I. Ya., Vasil'eva V. V., Terehov V. A. Izvestija AN SSSR. Serija Neorganicheskie materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1988, vol. 24, no. 12, pp. 1941-1944. (in Russ.)
64. Mittova I. Ya., Vasil'eva V. V., Semenov V. N. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1988, vol. 24, no. 4, pp. 539-541. (in Russ.)
65. Mittova I. Ya., Sviridova V. V., Semenov V. N. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 6, pp. 908-911. (in Russ.)
66. Mittova I. Ya., Sviridova V. V., Fetisova S. V. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1992, vol. 28, no. 9, pp. 1829-1832. (in Russ.)
67. Mittova I. Ya., Sviridova V. V., Koljukaeva I. A. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 12, pp. 1954-1958. (in Russ.)
68. Mittova I. Ya., Sviridova V. V., Koljukaeva I. A. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 8, pp. 1244-1248. (in Russ.)
69. Mittova I. Ya., Sviridova V. V., Fetisova S. V. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1991, vol. 27, no. 12, pp. 2488-2490. (in Russ.)
70. Mittova I. Ya., Pshestanchik V. R., Malyshev O. M. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1992, vol. 28, no. 5, pp. 2041-2044. (in Russ.)
71. Mittova I. Ya., Kostrjukov V. F., Pshestanchik V. R., Kashkarov V. M., Prokin A. N. Russian Journal of Inorganic Chemistry, 2001, vol. 46, no. 5, pp. 818-822. (in Russ.)
72. Mittova I. Ya., Kostrjukov V. F., Pshestanchik V. R., Kashkarov V. M. Russian Russian Journal of Inorganic Chemistry, 2002, vol. 47, no. 6, pp. 886-891. (in Russ.)
73. Penskoi P. K., Kostryukov V. F., Kutsev S. V., Kuznetsova I. V., Pshestanchik V. R., Mittova I. Ya. Russian Journal of Inorganic Chemistry, 2009, vol. 54, no. 10, pp. 1564–157. DOI: 10.1134/S0036023609100118
74. Penskoy P. K., Mittova I. Ya., Kostryukov V. F., Kononova E. Yu., Reutova E. A. Condensed Matter and Interphase, 2008, vol. 10, no. 3, pp. 236-243. Available at: http://www.kcmf.vsu.ru/resources/t_10_3_2008_005.pdf (in Russ.)
75. Roginskij S. Z. Geterogennyj kataliz. Nekotorye voprosy teorii [Heterogeneous Catalysis. Some Questions of Theory]. Moscow, Nauka Publ., 1979, 416 p. (in Russ.)
76. Krylov O. V. Geterogennyj kataliz [Heterogeneous Catalysis]. Moscow, Akademkniga Publ., 2004, 679 p. (in Russ.)
77. Lobanov N. N., Izotov A. D., Pashkova O. N., Sanygin V. P. Inorganic Materials, 2014, vol. 50, no. 6, pp. 541-545. DOI: 10.7868/S0002337X14060116
78. Mollaev A. Ju., Arslanov R. K., Kamilov I. K., Novotortsev V. M., Marenkin S. F., Jamamedov R. G., Khohlachev P. P., Fedorchenko I. V. Bulletin of the Russian Academy of Sciences: Physics, 2013, vol. 77, no. 10, pp. 1437-1441. DOI: 10.7868/S0367676513100293 (in Russ.)
79. Ievlev V. M., Maksimenko A. A., Sitnikov A. I., Solntsev K. A., Chernyavsky A. S., Dontsov A. I. Materialovedenie [Inorganic Materials: Applied Research], 2016, no. 2, pp. 37-40. (in Russ.)
80. Ievlev V. M., Kannykin S. V., Il’inova T. N., Volodina M. S., Bobrinskaya E. V., Baikin A. S., Vavilova V. V., Serikov D. V. Inorganic Materials, 2016, vol. 52, no. 7, pp. 677-685. DOI: 10.7868/S0002337X1607006X
81. Sukhochev A. S., Tomina E. V., Mittova I. Ya. Glass Physics and Chemistry, 2008, vol. 34, no. 6, pp. 724-741. DOI: 10.1134/S1087659608060102
82. Tomina E. V., Sukhochev A. S., Meshherjakova E. K., Mittova I. Ya. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 2008, no. 11, pp. 88-92. (in Russ.)
83. Mittova I. Ya., Tomina E. V., Lapenko A. A. Inorganic Materials, 2005, vol. 41, no. 3, pp. 263-267. DOI: 10.1007/s10789-005-0108-y
84. Mittova I. Ya., Tomina E. V., Lapenko A. A., Horohordina A. O. Inorganic Materials, 2004, vol. 40, no. 5, pp. 519-523. DOI: 10.1023/B:INMA.0000027588.78546.af
85. Mittova I. Ya., Tomina E. V., Suhochev A. S., Prokin A. N., Vasjukevich A. O. Russian Microelectronics, 2002, vol. 31, no. 2, pp. 99-103. DOI: 10.1023/A:1014385224423
86. Mittova I. Ya., Tomina E. V., Lapenko A. A. Condensed Matter and Interphase, 2005, vol. 7, no. 1, pp. 72-76. Available at: http://www.kcmf.vsu.ru/resources/t_07_1_2005_013.pdf (in Russ.)
87. Mittova I. Ya., Tomina E. V., Suhochev A. S., Vasyukevich A. O. Inorganic Materials, 2003, vol. 39, no. 12, pp. 1284–1287. DOI: 10.1023/B:INMA.0000008914.56903.be
88. Nakamoto K. Infrared and Raman Spectra of Inorganic and Coordination Compounds. John Wiley & Sons, 1986, 425 p.
89. Pechkovskij V. V. Atlas IK-spektrov ortofosfatov [Atlas of IR Spectra of Orthophosphates]. Moscow, Nauka Publ., 1981, 218 p. (in Russ.)
90. Mel'nikova R. Ja. Atlas IK-spektrov fosfatov [Atlas of IR Spectra of Phosphates]. Moscow, Nauka Publ., 1985, 235 p. (in Russ.)
91. Breza Ju., Venger E. F., Konakova R. V., Ljapin V. G., Milenin V. V., Statov V. A., Thorik Ju. A. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1998, no. 5, pp. 110-127. (in Russ.)
92. Williams M. D., Petro W. G., Kendelewicz T., Pan S. H., Lindau I., Spicer W. E. Solid State Commun., 1984, vol. 51, no. 10, pp. 819-822. DOI: 10.1016/0038-1098(84)90475-7
93. Han Q., Schmidt-Fetzer R. Z. fur Metallkunde, 1993, vol. 84, no. 9, pp. 605-612.
94. Rozhanskij N. V., Akimov A. G. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1990, no. 12, pp. 57-68. (in Russ.)
95. Glushko V. P. Termodinamicheskie svojstva individual'nyh veshhestv. Spravochnoe izdanie [Thermodynamic Properties of Individual Substances. Reference edition]. Moscow, Nauka Publ., pt. I–IV, 1985. (in Russ.)
96. STM Powder Diffraction Data Card File. Joint Committee on Powder Diffraction Standards. Pennsylvania, 1972.
97. PC-PDF 2 Database (Sets1-45). PDF Card Retrieval / ed. by R. Jenkins, R. Anderson, G.J. McCarthy. JCPDS – International Center for Diffraction Data, 1995.
98. Gates B., Katzer G., Schuit G. Chemistry of Catalytic Processes. New York, McGraw-Hill, 1979, 551 p.
99. Krylov O. V., Kiselev V. F. Adsorbcija i kataliz na perehodnyh metallah i ih oksidah [Adsorption and Catalysis on Transition Metals and Their Oxides]. Moscow, Himija Publ., 1981, 286 p. (in Russ.)
100. Krasnov K. S. Fizicheskaja himija: v 2-h kn [Physical Chemistry: in 2 books]. Moscow, Vyssh. shk. Publ., pt. 1, 2001, 318 p. (in Russ.)
101. Poraj-Koshica M. A. Strukturnaja neorganicheskaja himija: v 3 t. [Structural Inorganic Chemistry: 3 p.]. Moscow, Mir Publ., pt. 3, 1987, 563 p. (in Russ.)
102. Samsonov G. V., Verejkina L. L. Fosfidy [Phosphides]. Kiev, Izdatel'stvo Akademii Nauk USSR Publ., 1961, 128 p. (in Russ.)
103. Lyakishev N. P. Diagrammy sostojanija dvojnyh metallicheskih system [Diagrams of the State of Double Metal Systems]. Moscow, Mashinostroenie Publ., pt. 1, 1996, 992 p. (in Russ.)
2. Sluchinskaja I. A. Osnovy materialovedenija i tehnologii poluprovodnikov [Fundamentals of Materials Science and Semiconductor Technology]. Moscow, Mir Publ., 2002, 376 p. (in Russ.)
3. Pasynkov V. V., Sorokin V. S. Materialy jelektronnoj tehniki [Materials of Electronic Engineering]. SPb, Lan' Publ., 2001, 368 p. (in Russ.)
4. Knunjanc I. L. Himicheskaja jenciklopedija: v 5 t. [Chemical Encyclopedia: 5 p.]. Moscow, Sov. jencikl. Publ., 1990, pt. 2, 671 p. (in Russ.)
5. Aseeva A. L. Nanotehnologii v poluprovodnikovoj jelektronike [Nanotechnology in Semiconductor Electronics]. Novosibirsk, SO RAN Publ., 2004, 368 p. (in Russ.)
6. Ismailov I., Sodikov M., Sharipov S. Izvestija Akademii nauk respubliki Tadzhikistan otdelenie fiziko-matematicheskih, himicheskih, geologicheskih i tehnicheskih nauk [Izvestiya of the Academy of Sciences of the Republic of Tajikistan Department of Physical, Mathematical, Chemical, Geological and Technical Sciences], 2012, no. 1 (146), р. 53. (in Russ.)
7. Bolkhovityanov Ju. B., Pchelyakov O. P. Physics-Uspekhi, 2008, vol. 178, no. 5, pp. 459-480. DOI: 10.3367/UFNr.0178.200805b.0459
8. Sychikova Ja. A. Nanorazmernye struktury na poverhnosti fosfida indija [Nanosize Structures on the Surface of Indium Phosphide]. LAP Lambert Academic Publishing, 2014, 127 p. (in Russ.)
9. Engström O. The MOS System. Cambridge University Press, 2014, 216 p.
10. Aderstedt E., Medugorac I., Lundgren P. Sol. St. Electron, 2002, vol. 46 (4). pp. 497-500. DOI: 10.1016/S0038-1101(01)00298-2
11. Oktyabrsky S. Fundamentals of III-V Semiconductor MOSFETs. Springer Science LCC, 2013, 447 p.
12. Chistohin I. B., Zhuravlev K. S. Uspehi prikladnoj fiziki [Advances in Applied Physics], 2015, vol. 3, no. 1, pp. 85-94. (in Russ.)
13. Sheng S. Li Semiconductor Physical Electronics. New York, 2006, 708 p.
14. Arbiol J., Xiong Q. Semiconductor Nanowires: Materials, Synthesis, Characterization and Applications. Elsevier Ltd, 2015, 554 p.
15. Bachhofer H., Reisinger H., Bertagnolli E., von Philipsborn H. J. Appl. Phys., 2011, no. 89 (5), pp. 2791-2800. DOI: 10.1063/1.1343892
16. Ahmad S. R., Cartwright M. Laser Ignition of Energetic Materials. John Wiley & Sons Ltd, 2015, 425 p. DOI: 10.1002/9781118683521
17. Ünlü H., Horing N. J. M., Dabowski J. Low-Dimensional and Nanostructured Materials and Devices. Springer Science LCC, 2015, 674 p. DOI: 10.1007/978-3-319-25340-4
18. Alferov Zh. I. Russian Chemical Reviews, 2013, vol. 82, no. 7, pp. 587-596. DOI: 10.1070/RC2013v082n07ABEH004403
19. Zhukov A. E., Kovsh A. R., Nikitina E. V., Ustinov V. M., Alferov Zh. I. Semiconductors, 2007, vol. 41, no. 5, pp. 625-630. DOI: 10.1134/S1063782607050223
20. Berman L. S., Gabaraeva A. D., Kamanin A. V., Karimov I., Kljachkin L. E., Sharonova L. V., Shmidt N. M. Pis'ma v zhurnal tehnicheskoj fiziki [Letters to the Journal of Technical Physics], 1996, vol. 22, no. 2, pp. 65-69. (in Russ.)
21. Pulver D., Wilmsen C. W. J. Vac. Sci. Technol. B, 2001, vol. 19, pp. 207-214. DOI: 10.1116/1.1342008
22. Beljakova E. D., Gabaraeva A. D., Goreljonok A. T., Karzhavin R.V., Mikushkin V.M., Sysoev S. E., Shmidt N. M. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1992, no. 7, pp. 88-93. (in Russ.)
23. Wilmsen C. W. Thin Solid Films, 1976, vol. 39, no 1-2-3, pp. 105-117. DOI: 10.1016/0040-6090(76)90628-3
24. Wilmsen C. W., Ku R.W., Ceib K. M. Journal of Vacuum Science and Technology, 1979, vol. 16, no. 5, pp. 1434-1438.
25. Mittova I. Ya. Vestnik VGU. Serija: Himija, biologija [Bulletin of the VSU. Series: Chemistry, Biology], 2000, no. 2, pp. 5-12. (in Russ.)
26. Lacuesta T. D. The InP Surface and its Native Oxide. Perth: Murdoch University, 1991, 210 p.
27. Wager J. F., Wilmsen C. W. Journal of Applied Physics, 1980, vol. 51, no. 1, pp. 812-814. DOI: 10.1063/1.327302
28. Spicer W. E., Weber E. R., Liliental-Weber Z., Lindau I. Journal of Vacuum Science and Technology B, 1988, vol. 6, no. 4, pp. 1245-1251. DOI: 10.1116/1.584244
29. Warren A. C., Woodall J. M., Kirchner P. D., Yin X., Pollak F., Melloch M. R., Otsuka N., Mahalingam K. Physical Review B, 1992, vol. 46, pp. 4617-4620. DOI: 10.1103/PhysRevB.46.4617
30. Spicer W. E., Skeath P., Lindau I., Chye P. Physical Review Letters, 1980, vol. 44, pp. 420-423. DOI: 10.1103/PhysRevLett.44.420
31. Allwood D. A., Carline R. T., Mason N. J., Pickering C., Tanner B. K., Walker P. J. Thin Solid Films, 2000, vol. 364, pp. 33-39. DOI: 10.1016/S0040-6090(99)00959-1
32. Guillén-Cervantes A., Rivera-Alvarez Z., Lopez-Lopez M., Lopez-Luna E., Hernandez-Calderon I. Thin Solid Films, 2000, vol. 373, pp. 159-163. DOI: 10.1016/S0040-6090(00)01126-3
33. Pakes A., Skeldon P., Thompson G. E., Hussey R. J., Moisa S., Sproule G. I., Landheer D., Graham M. J. Surface and Interface Analysis, 2002, vol. 34, pp. 481-484. DOI: 10.1002/sia.1343
34. Torhov N. A. Semiconductors, 2003, vol. 37, no. 10, pp. 1205-1213. DOI: 10.1134/1.1619513.
35. Tomashpolskii Y. Y., Sadovskaya N. V, Grigor'eva G. A. The Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2013, no. 9, pp. 95. DOI: 10.7868/S0207352813090175
36. Emel'janov A. V., Portnov S. M. The Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 1995, no. 9, pp. 65-70.
37. Habibulin I. M. Diss. cand. chem. nauk. Stavropol, 1999, 110 p.
38. Isakov D. S., Korobov P. P., Habibullin I. M., Valjuhov D. P. Vestnik Severo-Kavkazskogo federal'nogo universiteta [Bulletin of the North-Caucasian Federal University], 2010, no. 2, pp. 40-45. (in Russ.)
39. Schmuki P., Hussey, R. J., Sproule, G. I., Tao Y., Wasilewski Z. R., McCaffrey J. P., Graham M. J. Corrosion Science, 1999, vol. 41, pp. 1467-1474. DOI: 10.1016/S0010-938X(98)00172-3
40. Nikolaev Ju. A., Rud' V. Ju., Rud' Ju. V., Terukov E. I. Pis'ma v zhurnal tehnicheskoj fiziki [Technical Physics Letters], 2007, vol. 33, no. 4, pp. 331-315. DOI: 10.1134/S1063785007040128
41. Levin M. N., Semenova G. V., Tatarintsev A. V., Shumskaya O. N. Pis'ma v zhurnal tehnicheskoj fiziki [Technical Physics Letters], 2005, vol. 31, no. 9, pp. 762-764. DOI: https://doi.org/10.1134/1.2061739
42. Semenova G. V., Shumskaya O. N., Tatarintzev A. V., Dolgopolova E. A., Dronov M. A., Levin M. N. Condensed Matter and Interphase, 2005, vol. 7, no. 2, pp. 150-153. Available at: http://www.kcmf.vsu.ru/resources/t_07_2_2005_007.pdf (in Russ.)
43. Mittova I. Ya., Pshestanchik V. R. Doklady Akademii Nauk SSSR, 1991, vol. 318, no. 1, pp. 139-143.
44. Benmoussa M., Ibnouelghazi E., Bennouna A., Ameziane E. L. Thin Solid Films, 1995, vol. 265, no. 1-2, pp. 22-28. DOI: 10.1016/0040-6090(95)06617-9
45. Oreshkin V. V., Sedoj V. S., Chemezova L. I. Prikladnaya Fizika [Applied Physics], 2001, no. 3, pp. 94-102. (in Russ.)
46. Vinichenko D. A., Zlomanov V. P., Vasil'ev V. A., Seregin D. S., Berezina O. Y. Inorganic Materials, 2011, vol. 47, no. 3, pp. 330-335. DOI: 10.1134/S0020168511030216
47. Mittova I. Ya., Tomina E. V., Borzakova G. V. Neorganicheskie Materialy [Inorganic Materials], 1991, vol. 27, no. 12, pp. 2480-2483. (in Russ.)
48. Mittova I. Ya., Tomina E. V., Makeeva N. N. Zhurnal neorganicheskoj himii [Russian Journal of Inorganic Chemistry], 1991, vol. 36, no. 12, pp. 3072-3076. (in Russ.)
49. Mittova I. Ya., Tomina E. V., Gubova L. V., Makeeva N. N. Neorganicheskie Materialy [Inorganic Materials], 1992, vol. 28, no. 7, pp. 1360-1364. (in Russ.)
50. Mittova I. Ya., Tomina E. V., Golovenko N. A., Agapov B. L. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 5, pp. 603-606. (in Russ.)
51. Mittova I. Ya., Tomina E. V., Agapov B. L., Maksimova O. V., Borzakova G. V. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 6, pp. 774-777. (in Russ.)
52. Mittova I. Ya., Tomina E. V., Borzakova G. V., Litvinenko E. V. Neorganicheskie Materialy [Inorganic Materials], 1994, vol. 30, no. 5, pp. 612-615. (in Russ.)
53. Mittova I. Ya. Tomina E. V., Soshnikov 3. V., Kashkarov V. L. Neorganicheskie Materialy [Inorganic Materials], 1996, vol. 30, no. 7, pp. 1218-1221. (in Russ.)
54. Mittova I. Ya., Pshestanchik V. R., Tomina E. V., Antipko S. L. Russian Journal of Inorganic Chemistry, 1999, vol. 44, no. 1, pp. 15-19.
55. Mittova I. Ya., Lavrushina S. S., Afonchikova A. V. Russian Journal of Inorganic Chemistry, 2004, vol. 49, no. 8, pp. 1138–1142.
56. Mittova I. Ya., Lavrushina S. S., Kashkarov V. M., Lebedeva E. V., Popelo A. V. Russian Journal of Inorganic Chemistry, 2006, vol. 51, no. 8, pp. 1163–1166. DOI: 10.1134/S0036023606080031
57. Mittova I. Ya., Puhova V. V., Klementeva I. F., Semenov V. N., Kashkarov V.M. Neorganicheskie Materialy [Inorganic Materials], 1988, vol. 24, no. 9, pp. 1431–1434. (in Russ.)
58. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Kashkarov V. M., Shhukarev A. V., Soshnikova M. A. Neorganicheskie Materialy [Inorganic Materials], 1996, vol. 32, no. 9, pp. 917-919.
59. Mittova I. Ya., Soshnikov I. M., Terehov V. A. Neorganicheskie Materialy [Inorganic Materials], 1993, vol. 29, no. 5, pp. 598-601. (in. Russ.)
60. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Shhukarev A. V. Neorganicheskie Materialy [Inorganic Materials], 1997, vol. 33, no. 6, pp. 543-545.
61. Mittova I. Ya., Soshnikov I. M., Terehov V. A., Semenov V. N. Neorganicheskie Materialy [Inorganic Materials], 2000, vol. 36, no. 10, pp. 975-978.
62. Mittova I. Ya., Pshestanchik V. R. Russian Chemical Reviews, 1991, vol. 60, no. 9, pp. 1898-1919. DOI: 10.1070/RC1991v060n09ABEH001122
63. Mittova I. Ya., Vasil'eva V. V., Terehov V. A. Izvestija AN SSSR. Serija Neorganicheskie materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1988, vol. 24, no. 12, pp. 1941-1944. (in Russ.)
64. Mittova I. Ya., Vasil'eva V. V., Semenov V. N. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1988, vol. 24, no. 4, pp. 539-541. (in Russ.)
65. Mittova I. Ya., Sviridova V. V., Semenov V. N. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 6, pp. 908-911. (in Russ.)
66. Mittova I. Ya., Sviridova V. V., Fetisova S. V. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1992, vol. 28, no. 9, pp. 1829-1832. (in Russ.)
67. Mittova I. Ya., Sviridova V. V., Koljukaeva I. A. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 12, pp. 1954-1958. (in Russ.)
68. Mittova I. Ya., Sviridova V. V., Koljukaeva I. A. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1989, vol. 25, no. 8, pp. 1244-1248. (in Russ.)
69. Mittova I. Ya., Sviridova V. V., Fetisova S. V. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1991, vol. 27, no. 12, pp. 2488-2490. (in Russ.)
70. Mittova I. Ya., Pshestanchik V. R., Malyshev O. M. Izvestija AN SSSR. Serija Neorganicheskie Materialy [News of the Academy of Sciences of the USSR. Series Inorganic Materials], 1992, vol. 28, no. 5, pp. 2041-2044. (in Russ.)
71. Mittova I. Ya., Kostrjukov V. F., Pshestanchik V. R., Kashkarov V. M., Prokin A. N. Russian Journal of Inorganic Chemistry, 2001, vol. 46, no. 5, pp. 818-822. (in Russ.)
72. Mittova I. Ya., Kostrjukov V. F., Pshestanchik V. R., Kashkarov V. M. Russian Russian Journal of Inorganic Chemistry, 2002, vol. 47, no. 6, pp. 886-891. (in Russ.)
73. Penskoi P. K., Kostryukov V. F., Kutsev S. V., Kuznetsova I. V., Pshestanchik V. R., Mittova I. Ya. Russian Journal of Inorganic Chemistry, 2009, vol. 54, no. 10, pp. 1564–157. DOI: 10.1134/S0036023609100118
74. Penskoy P. K., Mittova I. Ya., Kostryukov V. F., Kononova E. Yu., Reutova E. A. Condensed Matter and Interphase, 2008, vol. 10, no. 3, pp. 236-243. Available at: http://www.kcmf.vsu.ru/resources/t_10_3_2008_005.pdf (in Russ.)
75. Roginskij S. Z. Geterogennyj kataliz. Nekotorye voprosy teorii [Heterogeneous Catalysis. Some Questions of Theory]. Moscow, Nauka Publ., 1979, 416 p. (in Russ.)
76. Krylov O. V. Geterogennyj kataliz [Heterogeneous Catalysis]. Moscow, Akademkniga Publ., 2004, 679 p. (in Russ.)
77. Lobanov N. N., Izotov A. D., Pashkova O. N., Sanygin V. P. Inorganic Materials, 2014, vol. 50, no. 6, pp. 541-545. DOI: 10.7868/S0002337X14060116
78. Mollaev A. Ju., Arslanov R. K., Kamilov I. K., Novotortsev V. M., Marenkin S. F., Jamamedov R. G., Khohlachev P. P., Fedorchenko I. V. Bulletin of the Russian Academy of Sciences: Physics, 2013, vol. 77, no. 10, pp. 1437-1441. DOI: 10.7868/S0367676513100293 (in Russ.)
79. Ievlev V. M., Maksimenko A. A., Sitnikov A. I., Solntsev K. A., Chernyavsky A. S., Dontsov A. I. Materialovedenie [Inorganic Materials: Applied Research], 2016, no. 2, pp. 37-40. (in Russ.)
80. Ievlev V. M., Kannykin S. V., Il’inova T. N., Volodina M. S., Bobrinskaya E. V., Baikin A. S., Vavilova V. V., Serikov D. V. Inorganic Materials, 2016, vol. 52, no. 7, pp. 677-685. DOI: 10.7868/S0002337X1607006X
81. Sukhochev A. S., Tomina E. V., Mittova I. Ya. Glass Physics and Chemistry, 2008, vol. 34, no. 6, pp. 724-741. DOI: 10.1134/S1087659608060102
82. Tomina E. V., Sukhochev A. S., Meshherjakova E. K., Mittova I. Ya. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 2008, no. 11, pp. 88-92. (in Russ.)
83. Mittova I. Ya., Tomina E. V., Lapenko A. A. Inorganic Materials, 2005, vol. 41, no. 3, pp. 263-267. DOI: 10.1007/s10789-005-0108-y
84. Mittova I. Ya., Tomina E. V., Lapenko A. A., Horohordina A. O. Inorganic Materials, 2004, vol. 40, no. 5, pp. 519-523. DOI: 10.1023/B:INMA.0000027588.78546.af
85. Mittova I. Ya., Tomina E. V., Suhochev A. S., Prokin A. N., Vasjukevich A. O. Russian Microelectronics, 2002, vol. 31, no. 2, pp. 99-103. DOI: 10.1023/A:1014385224423
86. Mittova I. Ya., Tomina E. V., Lapenko A. A. Condensed Matter and Interphase, 2005, vol. 7, no. 1, pp. 72-76. Available at: http://www.kcmf.vsu.ru/resources/t_07_1_2005_013.pdf (in Russ.)
87. Mittova I. Ya., Tomina E. V., Suhochev A. S., Vasyukevich A. O. Inorganic Materials, 2003, vol. 39, no. 12, pp. 1284–1287. DOI: 10.1023/B:INMA.0000008914.56903.be
88. Nakamoto K. Infrared and Raman Spectra of Inorganic and Coordination Compounds. John Wiley & Sons, 1986, 425 p.
89. Pechkovskij V. V. Atlas IK-spektrov ortofosfatov [Atlas of IR Spectra of Orthophosphates]. Moscow, Nauka Publ., 1981, 218 p. (in Russ.)
90. Mel'nikova R. Ja. Atlas IK-spektrov fosfatov [Atlas of IR Spectra of Phosphates]. Moscow, Nauka Publ., 1985, 235 p. (in Russ.)
91. Breza Ju., Venger E. F., Konakova R. V., Ljapin V. G., Milenin V. V., Statov V. A., Thorik Ju. A. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1998, no. 5, pp. 110-127. (in Russ.)
92. Williams M. D., Petro W. G., Kendelewicz T., Pan S. H., Lindau I., Spicer W. E. Solid State Commun., 1984, vol. 51, no. 10, pp. 819-822. DOI: 10.1016/0038-1098(84)90475-7
93. Han Q., Schmidt-Fetzer R. Z. fur Metallkunde, 1993, vol. 84, no. 9, pp. 605-612.
94. Rozhanskij N. V., Akimov A. G. Poverhnost'. Fizika, himija, mehanika [Surface: Physics, Chemistry, Mechanics], 1990, no. 12, pp. 57-68. (in Russ.)
95. Glushko V. P. Termodinamicheskie svojstva individual'nyh veshhestv. Spravochnoe izdanie [Thermodynamic Properties of Individual Substances. Reference edition]. Moscow, Nauka Publ., pt. I–IV, 1985. (in Russ.)
96. STM Powder Diffraction Data Card File. Joint Committee on Powder Diffraction Standards. Pennsylvania, 1972.
97. PC-PDF 2 Database (Sets1-45). PDF Card Retrieval / ed. by R. Jenkins, R. Anderson, G.J. McCarthy. JCPDS – International Center for Diffraction Data, 1995.
98. Gates B., Katzer G., Schuit G. Chemistry of Catalytic Processes. New York, McGraw-Hill, 1979, 551 p.
99. Krylov O. V., Kiselev V. F. Adsorbcija i kataliz na perehodnyh metallah i ih oksidah [Adsorption and Catalysis on Transition Metals and Their Oxides]. Moscow, Himija Publ., 1981, 286 p. (in Russ.)
100. Krasnov K. S. Fizicheskaja himija: v 2-h kn [Physical Chemistry: in 2 books]. Moscow, Vyssh. shk. Publ., pt. 1, 2001, 318 p. (in Russ.)
101. Poraj-Koshica M. A. Strukturnaja neorganicheskaja himija: v 3 t. [Structural Inorganic Chemistry: 3 p.]. Moscow, Mir Publ., pt. 3, 1987, 563 p. (in Russ.)
102. Samsonov G. V., Verejkina L. L. Fosfidy [Phosphides]. Kiev, Izdatel'stvo Akademii Nauk USSR Publ., 1961, 128 p. (in Russ.)
103. Lyakishev N. P. Diagrammy sostojanija dvojnyh metallicheskih system [Diagrams of the State of Double Metal Systems]. Moscow, Mashinostroenie Publ., pt. 1, 1996, 992 p. (in Russ.)
Published
2018-03-06
How to Cite
TominаE. V., Mittova, I. Y., & Zelenina, L. S. (2018). THERMAL OXIDATION AS A METHOD OF FORMATION OF NANOSCALE FUNCTIONAL FILMS ON AIIIBV SEMICONDUCTORS: INFLUENCE OF DEPOSITED METAL LAYERS. Condensed Matter and Interphases, 20(1), 6-24. https://doi.org/10.17308/kcmf.2018.20/472
Issue
Section
Статьи
