Technology for the production and studying the gas-dynamic characteristics of microfluidic gas chromatographic columns on silicon substrates

  • Igor A. Platonov Korolev Samara National Research University, Samara, Russian Federation
  • Igor A. Platonov Korolev Samara National Research University, Samara, Russian Federation
  • Vladimir I. Platonov Korolev Samara National Research University, Samara, Russian Federation
  • Andrey N. Agafonov Korolev Samara National Research University, Samara, Russian Federation
  • Taras A. Andreev Korolev Samara National Research University, Samara, Russian Federation
  • Kseniya I. Milanina Korolev Samara National Research University, Samara, Russian Federation
  • Nikolay A. Dyuzhev Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation
  • Maxim Yu. Chichenkov Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation
  • Vladislav V. Paramonov Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation
DOI: https://doi.org/10.17308/sorpchrom.2023.23/11314
Keywords: gas chromatographic column, MEMS, microtechnological systems, gas-dynamic characteristics

Abstract

The article presents a technology for the production of microfluidic gas chromatographic columns on the plane of silicon substrates with a channel length of 1 m and a channel cross section of 150x240 μm. The channel was formed by plasma-chemical etching and it was sealed using anode bonding. The results of the modelling and experimental study of the gas-dynamic characteristics of the manufactured column are presented, it was shown that the results of mathematical modelling differ from the experimental data by less than 1%, which allows using the constructed model to calculate the optimal location of the pillars inside the microfluidic channel in order to obtain the maximum loading capacity and efficiency of the manufactured gas chromatographic column.

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Author Biographies

Igor A. Platonov, Korolev Samara National Research University, Samara, Russian Federation

prof., grand Ph.D (technics), department of Chemistry, Samara National Research University, e-mail: pia@ssau.ru

Igor A. Platonov, Korolev Samara National Research University, Samara, Russian Federation

prof., grand Ph.D (technics), department of Chemistry, Samara National Research University, e-mail: pia@ssau.ru

Vladimir I. Platonov, Korolev Samara National Research University, Samara, Russian Federation

Ph.D. (chemistry), associate prof., department of Chemistry, Samara National Research University, Samara, Russian Federation, e-mail: rovvv@yandex.ru

Andrey N. Agafonov, Korolev Samara National Research University, Samara, Russian Federation

Ph.D. (technics), associate prof., department of Nanoengineering, Samara National Research University named after academician S.P. Korolev, Samara, Russian Federation

Taras A. Andreev, Korolev Samara National Research University, Samara, Russian Federation

engineer, department of Nanoengineering, Samara National Research University named after academician S.P. Korolev, Samara, Russian Federation

Kseniya I. Milanina, Korolev Samara National Research University, Samara, Russian Federation

assistant lecturer, department of Nanoengineering, Samara National Research University named after academician S.P. Korolev, Samara, Russian Federation

Nikolay A. Dyuzhev, Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation

Director of the CCU of MST and EKB, Ph.D. (physics and mathematics), Center for Collective Use "Microsystem Technology and Electronic Component Base", Zelenograd, Russian Federation

Maxim Yu. Chichenkov, Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation

Director of the Center for Product Design "Nano - and Microsystem Technology", Ph.D. (physics and mathematics), Center for Collective Use "Microsystem Technology and Electronic Component Base", Zelenograd, Russian Federation

Vladislav V. Paramonov, Microsystem Technology and Electronic Component Base, Zelenograd, Russian Federation

post-graduate student, Department of Integrated Electronics and Microsystems, Center for Collective Use "Microsystem Technology and Electronic Component Base", Zelenograd, Russian Federation

References

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Published
2023-07-17
How to Cite
Platonov, I. A., Platonov, I. A., Platonov, V. I., Agafonov, A. N., Andreev, T. A., Milanina, K. I., Dyuzhev, N. A., Chichenkov, M. Y., & Paramonov, V. V. (2023). Technology for the production and studying the gas-dynamic characteristics of microfluidic gas chromatographic columns on silicon substrates. Sorbtsionnye I Khromatograficheskie Protsessy, 23(3), 343-350. https://doi.org/10.17308/sorpchrom.2023.23/11314
Issue
Vol 23 No 3 (2023): Sorbtsionnye i Khromatograficheskie Protsessy
Section
Статьи