ФОРМИРОВАНИЕ ПЛЕНОК СИСТЕМЫ (Y2O3-Fe2O3) НАНОРАЗМЕРНОГО ДИАПАЗОНА ТОЛЩИНЫ НА МОНОКРИСТАЛЛИЧЕСКОМ InP

Аннотация

Методом центрифугирования сформированы пленки наноразмерного диапазона толщины (лазерная, спектральная эллипсометрия) системы Y2O3–Fe2O3 на монокристаллическом InP из нитратного раствора. Состав пленок, выращенных без отжига - YFe2O4; отожженных термически при 200 °С – YFe2O4, Fe2O3 с примесью Fe3O4; прошедших импульсную фотонную обработку (50 Дж/см2, 0.4 с) и термооксидирование (450–550 °С, время 10–60 мин) – YFe2O4 и YFeO3. Отжиг с последующим термооксидированием способствует уменьшению размера зерен на поверхности выращенной пленки, но увеличивает среднюю шероховатость. Импульсная фотонная обработка обусловливает повышенную неровность поверхности гетероструктуры.

ИСТОЧНИК ФИНАНСИРОВАНИЯ
Работа выполнена при поддержке грантаРФФИ №18-03-00354 а.

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