Features of the two-stage formation of macroporous and mesoporous silicon structuresя

Keywords: macroporous silicon, mesoporous silicon, electrochemical etching, porosity, IR spectra, X-ray reflectivity

Abstract

The aim of this work was the formation of multilayer structures of macroporous silicon and the study of their structural, morphological, and optical properties in comparison with the properties of multilayer structures of mesoporous silicon. The paper presents the results of the development of techniques for the formation of multilayer structures of porous silicon por-Si by stepwise change in the current with two-stage modes of electrochemical etching.
The data on the morphology, composition, and porosity of macroporous and mesoporous silicon samples were obtained using scanning electron microscopy, IR spectroscopy, and X-ray reflectivity. It was shown that with the two-stage growth of porous silicon layers, the depth of the boundary between the layers of the structure was determined by the primary mode of electrochemical etching, while the total layer thickness increased with an increase in the current density of electrochemical etching.
A comparative analysis of the relative intensity and fine structure of vibrational modes of IR spectra indicated a significantly more developed specific pore surface and greater sorption capacity of mesoporous silicon as compared to macroporous silicon.

 

 

 

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Author Biographies

Alexander S. Lenshin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD in Physics and
Mathematics, Senior Researcher, Department of Solid
State Physics and Nanostructures, Voronezh State
University, Voronezh, Russian Federation; e-mail:
lenshinas@phys.vsu.ru

Anatoly N. Lukin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD in Physics and Mathematics,
Associate Professor, Department of Solid State Physics
and Nanostructures, Voronezh State University,
Voronezh, Russian Federation; e-mail: ckp_49@mail.ru

Yaroslav A. Peshkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD student, Department of
Solid State Physics and Nanostructures, Voronezh
State University, Voronezh, Russian Federation;
e-mail: Tangar77@mail.ru

Sergey V. Kannykin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD in Physics and Mathematics,
Associate Professor, Department of Materials Science
and the Industry of Nanosystems, Voronezh State
University, Voronezh, Russian Federation; e-mail:
svkannykin@gmail.com

Boris L. Agapov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

PhD in Technical Science, Centre
for Collective Use of Scientific Equipment, Voronezh
State University, Voronezh, Russian Federation;
e-mail: b.agapov2010@yandex.ru.

Pavel V. Seredin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Physics and Mathematics,
Head of the Department of Solid State Physics and
Nanostructures, Voronezh State University, Voronezh,
Russian Federation; e-mail: paul@phys.ru

Evelina P. Domashevskaya, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Physics and
Mathematics, Full Professor, Department of Solid State
Physics and Nanostructures, Voronezh State University,
Voronezh, Russian Federation; e-mail: ftt@phys.vsu.ru

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Published
2021-03-16
How to Cite
Lenshin, A. S., Lukin, A. N., Peshkov, Y. A., Kannykin, S. V., Agapov, B. L., Seredin, P. V., & Domashevskaya, E. P. (2021). Features of the two-stage formation of macroporous and mesoporous silicon structuresя . Kondensirovannye Sredy I Mezhfaznye Granitsy = Condensed Matter and Interphases, 23(1), 41-48. https://doi.org/10.17308/kcmf.2021.23/3300
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