Formation of smooth and microporous ZnO-based substrate material

Abubakar M. Ismailov; Arsen E. Muslimov

doi:10.17308/kcmf.2024.26/12219

Abubakar M. Ismailov Dagestan State University, 43-a Magomet Gadzhiev st., Makhachkala 367000, Republic of Dagestan, Russian Federation https://orcid.org/0000-0001-6834-0560
Arsen E. Muslimov National Research Centre “Kurchatov Institute” 1 Akademika Kurchatova pl., Moscow 123182, Russian Federation https://orcid.org/0000-0002-0524-7606

DOI: https://doi.org/10.17308/kcmf.2024.26/12219

Keywords: Zinc oxide, Hot target, Magnetron sputtering, Microporous Structure, substrates, Nitride technologies

Abstract

The paper investigates the influence of the deposition temperature on the morphology and structural-phase composition of the ZnO-based substrate material with a thickness of over 50 μm during the magnetron sputtering of hot ceramic targets.

The study revealed the influence of the deposition temperature on the growth rate, morphology, and structural parameters of the ZnO single crystal precipitate. It was shown that the ZnO deposition rates during the spluttering of hot ceramic targets were ultra-high (up to 1.5 μm/min). The authors propose a method for the formation of both smooth and microporous ZnO-based substrate materials without using template technologies.

The results obtained in the work can be widely used in optoelectronics and nitride technologies

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Author Biographies

Abubakar M. Ismailov, Dagestan State University, 43-a Magomet Gadzhiev st., Makhachkala 367000, Republic of Dagestan, Russian Federation

Cand. Sci. (Phys.–Math.),
Associate Professor at the Department of Physical
Electronics, Dagestan State University (Makhachkala,
Russian Federation)

Arsen E. Muslimov, National Research Centre “Kurchatov Institute” 1 Akademika Kurchatova pl., Moscow 123182, Russian Federation

Dr. Sci. (Phys.–Math.), Research
Fellow, Federal Research Institute “Crystallography
and Photonics” of the Russian Academy of Sciences
(Moscow, Russian Federation)

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