Влияние режимов электрохимического травления при одностадийном и двухстадийном формировании пористого кремния на степень окисления его поверхностных слоев в естественных условиях

Аннотация

В работе методами растровой электронной микроскопии и ультрамягкой
рентгеновской эмиссионной спектроскопии были проведены исследования особенностей
формирования многослойных структур пористого кремния и установлено влияние изменения плотности тока при электрохимическом травлении монокристаллических пластин кремния на фазовый состав поверхностных слоев сформированной пористой структуры.

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