Creation of thin films on the surface of InP with a controlled gas-sensitive signal under the influence of PbO + Y2O3 compositions

  • Victor F. Kostryukov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-5753-5653
  • Dar’ya S. Balasheva Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Anna S. Parshina Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
Keywords: Semiconductors, Indium phosphide, Thin films, Gas sensitivity, Thermal oxidation

Abstract

Thin-film objects with a reproducible temperature dependence of the resistance, thermally stable, and easy to obtain can be used as the sensitive elements in semiconductor gas sensors. The aim of this study was to create thin films on the InP surface under the influence of an oxide chemostimulator + inert component (PbO + Y2O3, respectively) compositions and to determine their gas-sensitive properties and their dependence on the formula of the composition.
Thin films were synthesised on the InP surface by the method of chemically stimulated thermal oxidation under the influence of various PbO + Y2O3 compositions. The thickness of the formed films, their elemental and chemical composition were determined (by laser ellipsometry, X-ray phase analysis, and infra-red spectroscopy). A number of experiments were carried out to establish the gas-sensitive properties of the obtained films with respect to ammonia with concentrations of 120, 100, and 80 ppm.
By chemically stimulated thermal oxidation, we obtained thin films with semiconductor properties on the InP surface. It was determined that the samples had n-type conductivity. A gas-sensitive response was detected in the presence of ammonia in the atmosphere. The ability to create thin films with a predetermined value of sensory response was demonstrated 

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Author Biographies

Victor F. Kostryukov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

DSc in Chemistry, Associate
Professor, Associate Professor at the Department of
Materials Science and the Industry of Nanosystems,
Voronezh State University, Voronezh, Russian
Federation; e-mail: vc@chem.vsu.ru

Dar’ya S. Balasheva, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

student at the Department of
Materials Science and the Industry of Nanosystems,
Voronezh State University, Voronezh, Russian
Federation; e-mail: balasheva.98@mail.ru

Anna S. Parshina, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

master’s degree student,
Department of Materials Science and the Industry of
Nanosystems, Voronezh State University, Voronezh,
Russian Federation; e-mail: anyuta_parshina@mail.ru

References

Kattrall R. V. Khimicheskiye sensory [Chemical sensors]. Moscow: Nauchnyy Mir Publ.; 2000. 144 p. (in Russ.)

Sproul W. D., Christie D. J., Carter D. C. Control of reactive sputtering processes. Thin Solid Films. 2005;491(1-2): 1-17. https://doi.org/10.1016/j.tsf.2005.05.022

Nanostrukturnyye oksidnyye materialy v sovremennoy mikro-, nano- i optoelektronike [Nanostructured oxide materials in modern micro-, nano- and optoelectronics]. V. A. Moshnikov, O. A. Aleksandrova (eds.). Saint Petersburg: Izd-vo SPbGETU “LETI” Publ., 2017. 266 p. (in Russ.)

Karpova S. S., Moshnikov V. A., Maksimov A. I., Mjakin S. V., Kazantseva N. E. Study of the effect of the acid-base surface properties of ZnO, Fe2O3 and ZnFe2O4 oxides on their gas sensitivity to ethanol vapor. Semiconductors. 2013;47(8): 1026–1030. https://doi.org/10.1134/S1063782613080095

. Rumyantseva M. N., Makeeva E.A., Badalyan S. M., Zhukova A. A., Gas’kov A. M. Nanocrystalline SnO2 and In2O3 as materials for gas sensors: the relationship between microstructure and oxygen chemisorption. Thin Solid Films. 2009;518(4): 1283–1288. https://doi.org/10.1016/j.tsf.2009.07.201

Rumyantseva M. N., Ivanov V. K., Rudyi Yu. M., Yushchenko V. V., Arbiol J., A. M. Gas’kov A. M. Microstructure and sensingpropertiesof nanocrystalline indium oxide prepared using hydrothermal treatment. Russian Journal of Inorganic Chemistry. 2009;54(2): 163-171. https://doi.org/10.1134/s0036023609020016

Ohgaki T., Matsuoka R., Watanabe K., Matsumoto K., Adachi Y., Sakaguchi I., Hishita S., Ohashi N., Hanedaa H. Synthesizing SnO2 thin films and characterizing sensing performances. Sensors and Actuators B. 2010;150(1): 99–104. https://doi.org/10.1016/j.snb.2010.07.036

Neria G., Bonavitaa A., Micalia G., Rizzoa G., Pinnab N. Effect of the chemical composition on the sensing properties of In2O3–SnO2 nanoparticles synthesized by a non-aqueous method. Sensors and Actuators B. 2008;130(1): 222–230. https://doi.org/10.1016/j.snb.2007.07.141

Singh N., Yan C., Lee P. S. Room temperature CO gas sensing using Zn-doped In2O3 single nanowire field effect transistors. Sensors and Actuators B. 2010;150(3): 19–24. https://doi.org/10.1016/j.snb.2010.07.051

Zeng Z., Wang K., Zhang Z., Chen J., Zhou W. The detection of H2S at room temperature by using individual indium oxide nanowire transistors. Nanotechnology. 2009;20(4): 045503. https://doi.org/10.1088/0957-4484/20/4/045503

Elouali S., Bloor L. G., Binions R., Parkin I. P., Carmalt C. J., Darr J. A. Gas sensing with nano-indium oxides (In2O3) prepared via continuous hydrothermal flow synthesis. Langmuir. 2012;28(3):1879–1885. https://doi.org/10.1021/la203565h

Huotari J., Lappalainen J., Puustinen J. Gas sensing properties of pulsed laser deposited vanadium oxide thin films with various crystal structures. Sensors and Actuators B. 2013;187: 386–394. https://doi.org/10.1016/j.snb.2012.12.067

Fergus J. W. Perovskite oxides for semiconductorbased gas sensors. Sensors and Actuators B. 2007;123(2): 1169–1179. ttps://doi.org/10.1016/j.snb.2006.10.051

Frank J., Fleischer M., Meixner H. Gas-sensitive electrical properties of pure and doped semiconducting Ga2O3 thick films. Sensors and Actuators B. 1998;48(1- 3): 318–321. https://doi.org/10.1109/7361.983471

Hoefer U., Frank J., Fleischer M. High temperature Ga2O3-gas sensors and SnO2-gas sensors: a comparison. Sensors and Actuators B. 2001;78(1-3): 6–11. https://doi.org/10.1016/s0925-4005(01)00784-5

Han S. D., Noh M. S., Kim S. Versatile approaches to tune a nanocolumnar structure for optimized electrical properties of In2O3 based gas sensor. Sensors and Actuators B. 2017;248: 894-901. https://doi.org/10.1016/j.snb.2017.01.108

Verma M. K., Gupta V. A highly sensitive SnO2- CuO multilayered sensor structure for detection of H2S gas. Sensors and Actuators B. 2012;166-167: 378–385. https://doi.org/10.1016/j.snb.2012.02.076

Tominа E. V., Mittova I. Ya., Sladkopevtsev B. V, Kostryukov V. F., Samsonov A. A., Tretyakov N. N. Thermal oxidation as a method of formation of nanoscale functional films on AIIIBV semiconductors: chemostimulated influence of metal oxides overview. Kondensirovannye sredy i mezhfaznye granitsy = Condensed Matter and Interphases. 2018;2(20): 184– 203. https://doi.org/10.17308/kcmf.2018.20/522 (In Russ., abstract in Eng.)

Mittova I. Ya. Influence of the physicochemical nature of chemical stimulators and the way they are introduced into a system on the mechanism of the thermal oxidation of GaAs and InP. Inorganic Materials. 2014;50(9): 874–881. https://doi.org/10.1134/s0020168514090088

JCPDC PCPDFWIN: A windows retrieval / Display program for accessing the ICDD PDF – 2 Data base. International Centre for Diffraction Data; 1997.

Mittova I. Ya., Pshestanchik V. R., Kostryukov V. F. Nelinejnye effekty v processah aktivirovannogo okisleniya GaAs [Nonlinear effects in the activated oxidation of GaAs]. Voronezh, Izdatelskopoligraficheskij centr Voronezhskogo gosudarstvennogo universiteta Publ.; 2008, 160 p. Available at: https:// www.elibrary.ru/item.asp?id=21199148 (in Russ.)

Kostryukov V.F. , M i t t o v a I . Ya . , Sladkopevtsev B. V. Method of precision doping thin films on InP surface: Patent No 2632261 RF. Claim. 17.12.2015. Publ. 03.10.2017. Byul. No.28.

Nakamoto K. Infrared and Raman spectra of inorganic and coordination compounds. New York: John Wiley; 1986. 479 p.

Published
2021-08-17
How to Cite
Kostryukov, V. F., Balasheva, D. S., & Parshina, A. S. (2021). Creation of thin films on the surface of InP with a controlled gas-sensitive signal under the influence of PbO + Y2O3 compositions. Condensed Matter and Interphases, 23(3), 406-412. https://doi.org/10.17308/kcmf.2021.23/3532
Section
Original articles

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