Chemical vapor deposition of Tm3Fe5O12 epitaxial films, investigation of their structure and properties in the terahertz range

Maria N. Markelova; Abduvosit A. Hafizov; Xiaoyu Shi; Igor E. Graboy; Maxim S. Shanin; Maria R. Konnikova; Alexander P. Shkurinov; Andrey R. Kaul

doi:10.17308/kcmf.2025.27/12488

Maria N. Markelova Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0000-0002-1014-9437
Abduvosit A. Hafizov Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0009-0003-0740-8180
Xiaoyu Shi Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0009-0007-4025-9032
Igor E. Graboy Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0009-0003-7011-2200
Maxim S. Shanin Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0009-0007-7215-4024
Maria R. Konnikova Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0000-0003-4701-6483
Alexander P. Shkurinov Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0000-0002-6309-4732
Andrey R. Kaul Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation https://orcid.org/0000-0002-3582-3467

DOI: https://doi.org/10.17308/kcmf.2025.27/12488

Keywords: Thin films, Iron garnets, MOCVD, Structure, Antisite defects, Raman spectroscopy, Terahertz spectroscopy

Abstract

In this study, for the search and development of new spintronic materials, thin films of Tm₃Fe₅O₁₂ iron garnet were obtained by the metalorganic chemical vapor deposition (MOCVD) on single-crystal Gd₃Ga₅O₁₂(111) – GGG and Y₃Al₅O₁₂(111) – YAG substrates. The Tm₃Fe₅O₁₂ films were investigated using X-ray diffraction, Energy dispersive X-Ray microanalysis, Raman spectroscopy and terahertz (THz) pulsed spectroscopy.

The epitaxial nature of films deposited on substrates of both types demonstrated. It was found that the growth of garnet film under the high-temperature vacuum conditions of MOCVD on a GGG substrate is complicated by the evaporation of gallium oxide, which causes the introduction of iron oxide into the surface layer of the substrate, enrichment of the adjacent layer of the film with thulium oxide and the formation of non-stoichiometric garnet with antisite defects.

It was concluded that YAG substrates are more promising, since the heteroepitaxy of iron garnets on them does not have such complications

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Author Biographies

Maria N. Markelova, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

Cand. Sci. (Chem.), Research Fellow at the Department of Chemistry, Lomonosov Moscow State University (Moscow, Russian Federation)

Abduvosit A. Hafizov, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

graduate student at the Higher School of Material Science, Lomonosov Moscow State University (Moscow, Russian Federation)

Xiaoyu Shi, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

master degree student at the Higher School of Material Science, Lomonosov Moscow State University
(Moscow, Russian Federation)

Igor E. Graboy, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

Cand. Sci. (Chem.), Senior Research Fellow at the Department of Chemistry, Lomonosov Moscow
State University (Moscow, Russian Federation)

Maxim S. Shanin, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

graduate student, Junior Research Fellow at the Department of Physics, Lomonosov Moscow State University (Moscow, Russian Federation); Research Fellow at National Research Centre “Kurchatov Institute” (Moscow, Russian Federation)

Maria R. Konnikova, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

Junior Research Fellow at the Department of Physics, Lomonosov Moscow State University (Moscow, Russian Federation); Junior Research Fellow at National Research Centre “Kurchatov Institute” (Moscow, Russian Federation)

Alexander P. Shkurinov, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

Dr. Sci. (Phys.–Math.), Сorresponding member of the Russian Academy of Sciences, Full Professor at the Chair of General Physics and Wave Processes, Lomonosov Moscow State University (Moscow, Russian Federation)

Andrey R. Kaul, Lomonosov Moscow State University, 1 Leninskie Gory, Moscow 119991, Russian Federation

Dr. Sci. (Chem.), Full Professor at the Chair of Inorganic Chemistry, Lomonosov Moscow State University, Moscow, Russian Federation

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