On the formation of the Ag2Si metastable phase in an Ag-Si film obtained by ion-beam sputtering

Authors

  • Konstantin A. Barkov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Vitaly V. Babakov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Gennady P. Potudansky Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Sergey A. Ivkov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Yaroslav A. Peshkov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Ivan V. Polshin Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Evgenii S. Kersnovsky Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Selby Y. Khydyrova Bauman Moscow State Technical University, 2nd Baumanskaya st., 5, p. 1, Moscow 105005, Russian Federation
  • Konstantin M. Moiseev Bauman Moscow State Technical University, 2nd Baumanskaya st., 5, p. 1, Moscow 105005, Russian Federation
  • Igor E. Zanin Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Alexandra K. Pelagina Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Nikita S. Buylov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Van Tu Tran University of Medicine and Pharmacy at Ho Chi Minh city, 217 Hong Bang Street, Wars 11, District 5, HCMC, Viet Nam
  • Alexandr E. Nikonov Voronezh State Technical University, 84 20 let Oktyabrya st., Voronezh 394006, Russian Federation
  • Aleksandr V. Sitnikov Voronezh State Technical University, 84 20 let Oktyabrya st., Voronezh 394006, Russian Federation

DOI:

https://doi.org/10.17308/kcmf.2026.28/13555

Keywords:

Metastable Ag-Si-based phases, AgSi3, Ag2Si, Ag3Si, silver silicides, ion-beam sputtering, Ultra-soft X-ray emission spectroscopy (USXES), Electronic density of states (DOS)

Abstract

Objectives: Nanocomposite films based on Ag-Si compounds have application in many areas of science and technology. However, their manufacturing process can be accompanied by the formation of silicides and metastable phases. In this connection, the task of developing methods for their identification arises. In this work, we attempted to solve this task using X-ray diffraction, ultra-soft X-ray emission spectroscopy, and theoretical calculations of the electron density of states for an Ag55Si45 film obtained by ion-beam sputtering of a composite target.

Experimental: As a result of comprehensive studies, a nanogranular structure of the film was revealed, with an average silver particle size of ~15 nm, separated by a matrix based on phases of amorphous silicon a-Si, SiO2, and suboxide SiO1.3, as well as a silver silicide phase. A comparison of the experimental Si L2.3 X-ray emission spectrum of the Ag55Si45 film with theoretically calculated spectra of the AgSi3, Ag2Si, and Ag3Si phases shows the best agreement with the spectrum of the Ag2Si phase. Moreover, the Ag2Si phase was detected in the works of other authors. 

Conclusions: Thus, based on X-ray diffraction, X-ray emission spectroscopy, and theoretical calculations of the electronic density of states, it has been established that a metastable Ag2Si phase is formed in the Ag55Si45 film produced by ion-beam sputtering

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Author Biographies

  • Konstantin A. Barkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Cand. Sci. (Phys.-Math.), Head of the Laboratory, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Vitaly V. Babakov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    student, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Gennady P. Potudansky, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Lead Data Analyst, RT Labs JSC (Voronezh, Russian Federation)

  • Sergey A. Ivkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Cand. Sci. (Phys.-Math.), Leading Electronics Engineer, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Yaroslav A. Peshkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Cand. Sci. (Phys.-Math.), Research Associate, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Ivan V. Polshin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    student, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Evgenii S. Kersnovsky, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    student, Department of Solid State Physics and Nanostructures, Voronezh State University (Voronezh, Russian Federation)

  • Selby Y. Khydyrova, Bauman Moscow State Technical University, 2nd Baumanskaya st., 5, p. 1, Moscow 105005, Russian Federation

    postgraduate student, Department of Electronic Technologies in Mechanical Engineering, Bauman Moscow State Technical University (Moscow, Russian Federation)

  • Konstantin M. Moiseev, Bauman Moscow State Technical University, 2nd Baumanskaya st., 5, p. 1, Moscow 105005, Russian Federation

    Assistant Professor, Department of Electronic Technologies in Mechanical Engineering, Bauman Moscow State Technical University (Moscow, Russian Federation)

  • Igor E. Zanin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Cand. Sci. (Phys.-Math.), Assistant Professor, General Physics Department, Voronezh State University (Voronezh, Russian Federation)

  • Alexandra K. Pelagina, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Engineer-Physicist, Voronezh State University (Voronezh, Russian Federation)

  • Nikita S. Buylov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

    Cand. Sci. (Phys.-Math.), Assistant Professor, Department of Solid State Physics and Nanostructures, Voronezh State University; Engineer, Research Institute of Electronic Technology (Voronezh, Russian Federation)

  • Van Tu Tran, University of Medicine and Pharmacy at Ho Chi Minh city, 217 Hong Bang Street, Wars 11, District 5, HCMC, Viet Nam

    Lecturer, Faculty of Fundamental Sciences, Department of Physics, University of Medicine and Pharmacy at Ho Chi Minh city (Ho Chi Minh city, Viet Nam)

  • Alexandr E. Nikonov, Voronezh State Technical University, 84 20 let Oktyabrya st., Voronezh 394006, Russian Federation

    Cand. Sci. (Phys.-Math.), Research Engineer, Department of Solid-State Electronics, Voronezh State Technical University (Voronezh, Russian Federation)

  • Aleksandr V. Sitnikov, Voronezh State Technical University, 84 20 let Oktyabrya st., Voronezh 394006, Russian Federation

    Dr. Sci. (Phys.-Math.), Full Professor, Departments of Solid-State Electronics, Voronezh State Technical University (Voronezh, Russian Federation)

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2026-04-01

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Vol. 28 No. 1 (2026)

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On the formation of the Ag2Si metastable phase in an Ag-Si film obtained by ion-beam sputtering. (2026). Kondensirovannye Sredy I Mezhfaznye Granitsy = Condensed Matter and Interphases, 28(1), 15-27. https://doi.org/10.17308/kcmf.2026.28/13555

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