Formation of silver nanocrystals in Ag-Si composite films obtained by ion beam sputtering

  • Konstantin A. Barkov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-8290-1088
  • Vladimir A. Terekhov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0002-0668-4138
  • Dmitry N. Nesterov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0002-2462-7153
  • Kirill E. Velichko Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation
  • Sergey A. Ivkov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0003-1658-5579
  • Nikita S. Buylov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation https://orcid.org/0000-0003-1793-4400
  • Sergey V. Kannykin Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-8756-5722
  • Igor E. Zanin Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation
  • Boris L. Agapov Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation
  • Sergey V. Rodivilov Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation
  • Evgenii S. Kersnovsky Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0009-0006-8215-6077
  • Ivan V. Polshin Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0009-0006-8215-6077
  • Stanislav V. Ryabtsev Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0001-7635-8162
  • Margarita V. Grechkina Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation https://orcid.org/0000-0002-7873-8625
  • Aleksandr V. Sitnikov Voronezh State Technical University, 84 20 letiya Oktyabrya st., Voronezh 394006, Russian Federation https://orcid.org/0000-0002-9438-9234
DOI: https://doi.org/10.17308/kcmf.2024.26/12215
Keywords: Silver nanoparticles, Ag NPs, Ag-Si films, Ultra-soft X-ray emission spectroscopy, Ion-beam sputtering

Abstract

Nanostructured composite films based on Ag-Si containing silver nanoparticles are used as a material for SERS (Surfaceenhanced Raman spectroscopy) substrates, plasmonic back reflector, nanoplasmonic sensors, nonlinear optics devices, memristor structures, etc. Due to the widespread use of nanocomposite films based on Ag-Si, there is a need to develop simple and affordable methods for their production compatible with semiconductor technology. Therefore, this work is devoted to the production of an Ag80Si20 nanocomposite film with a high silver content (80 at.%) by ion-beam sputtering with simultaneous control of the morphology, structure, phase composition and electrical properties of the manufactured sample. As a result of complex studies using X-ray diffraction, ultra-soft X-ray emission spectroscopy, SEM and AFM
microscopy, it was found that the film is a nanocomposite material based on silver nanoparticles with an average size of ~15÷30 nm. At the same time, some silver nanoparticles are in direct contact, while some Ag nanoparticles are isolated from each other by a shell of silicon dioxide SiO2 and amorphous silicon a-Si. Such a nanogranulated structure of the Ag80Si20 film causes the presence in the test sample of the effect of switching from a high-resistance state (880 Ohm) to a lowresistance state (~1 Ohm) under the action of a voltage of ~ 0.2 V. As a result of the formation of conductive filaments (CF) of Ag atoms in the dielectric layer between the silver granules

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Author Biographies

Konstantin A. Barkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Cand. Sci. (Phys.-Math.),
Head of the Laboratory, Department of Solid State
Physics and Nanostructures, Voronezh State University
(Voronezh, Russian Federation)

Vladimir A. Terekhov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Dr. Sci. (Phys.-Math.), Full
Professor, Department of Solid State Physics and
Nanostructures, Voronezh State University (Voronezh,
Russian Federation)

Dmitry N. Nesterov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Cand. Sci. (Phys.-Math.),
Assistant Professor, Department of Solid State Physics
and Nanostructures, Voronezh State University
(Voronezh, Russian Federation)

Kirill E. Velichko, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation

Process Engineer, Research Institute of Electronic Technology (Voronezh, Russian Federation)

Sergey A. Ivkov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Cand. Sci. (Phys.-Math.), Leading
Electronics Engineer, Department of Solid State
Physics and Nanostructures, Voronezh State University
(Voronezh, Russian Federation)

Nikita S. Buylov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation

Cand. Sci. (Phys.-Math.), Assistant
Professor, Department of Solid State Physics and
Nanostructures, Voronezh State University; Engineer,
Research Institute of Electronic Technology (Voronezh,
Russian Federation)

Sergey V. Kannykin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Cand. Sci. (Phys.-Math.),
Assistant Professor, Department of Materials Science
and the Industry of Nanosystems, Voronezh State
University; Engineer, Research Institute of Electronic
Technology (Voronezh, Russian Federation)

Igor E. Zanin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Cand. Sci. (Phys.-Math.), Assistant
Professor, General Physics Department, Voronezh
State University (Voronezh, Russian Federation)

Boris L. Agapov, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation; Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation

Cand. Sci. (Tech.), Centre for
Collective Use of Scientific Equipmen, Voronezh State
University, Research Institute of Electronic Technology
(Voronezh, Russian Federation)

Sergey V. Rodivilov, Research Institute of Electronic Technology, 5 Staryh Bolshevikov st., Voronezh 394033, Russian Federation

Leading Process Engineer,
Research Institute of Electronic Technology (Voronezh,
Russian Federation)

Evgenii S. Kersnovsky, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

student, Department of Solid
State Physics and Nanostructures, Voronezh State
University (Voronezh, Russian Federation)

Ivan V. Polshin, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

student, Department of Solid
State Physics and Nanostructures, Voronezh State
University (Voronezh, Russian Federation)

Stanislav V. Ryabtsev, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Dr. Sci. (Phys.-Math.),
Leading Researcher, Joint Scientific and Educational
Laboratory “Atomic and Electronic Structure of
Functional Materials” of Voronezh State University
and the National Research Center “Kurchatov
Institute”, Voronezh State University (Voronezh,
Russian Federation)

Margarita V. Grechkina, Voronezh State University, 1 Universitetskaya pl., Voronezh 394018, Russian Federation

Leading Electronics
Engineer, Departments of Semiconductor Physics and
Microelectronics, Voronezh State University (Voronezh,
Russian Federation)

Aleksandr V. Sitnikov, Voronezh State Technical University, 84 20 letiya Oktyabrya st., Voronezh 394006, Russian Federation

Dr. Sci. (Phys.-Math.), Full
Professor, Departments of Solid-State Electronics,
Voronezh State Technical University (Voronezh,
Russian Federation)

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Published
2024-07-12
How to Cite
Barkov, K. A., Terekhov, V. A., Nesterov, D. N., Velichko, K. E., Ivkov, S. A., Buylov, N. S., Kannykin, S. V., Zanin, I. E., Agapov, B. L., Rodivilov, S. V., Kersnovsky, E. S., Polshin, I. V., Ryabtsev, S. V., Grechkina, M. V., & Sitnikov, A. V. (2024). Formation of silver nanocrystals in Ag-Si composite films obtained by ion beam sputtering. Kondensirovannye Sredy I Mezhfaznye Granitsy = Condensed Matter and Interphases, 26(3), 407-416. https://doi.org/10.17308/kcmf.2024.26/12215
Issue
Vol 26 No 3 (2024)
Section
Original articles

Copyright (c) 2024 Kondensirovannye sredy i mezhfaznye granitsy = Condensed Matter and Interphases

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